| abstract |
The present invention relates to an antireflective coating comprising an amorphous silicon carbide-based film, which film further comprises hydrogen atoms and optionally further comprises oxygen and/or nitrogen, the film having an effective refractive index (n) between 2.3 and 2.7 and an extinction coefficient (k) of less than 0.01 at a wavelength of 630nm. The present invention also relates to methods for preparing the antireflective coating and to solar cells comprising the antireflective coating. |