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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
filingDate 2009-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72bd85bb533c902ad8f2ba6f22166e8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b138e2e18ee2f725d9edff3a2a27f98
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publicationDate 2009-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2009142692-A2
titleOfInvention Stable, high rate silicon slurry
abstract The invention provides a chemical mechanical polishing composition comprising wet process silica, a stabilizer compound, a potassium salt, a secondary amine compound, and water. The invention further provides a method of polishing a substrate with the polishing composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014505358-A
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priorityDate 2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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