| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_09d8247f9a4fab08a87031184126a7f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2009-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53a19114fe847fd04194c112a5f7c642 |
| publicationDate |
2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009136564-A1 |
| titleOfInvention |
Reflective mask, reflective mask blank and method for manufacturing reflective mask |
| abstract |
A substrate (11) of a reflective mask is provided with a multilayer reflecting film (13) having a structure wherein high refractive index layers and low refractive index layers are alternately laminated, and an absorbing film (15) which is laminated on the multilayer reflecting film (13) and absorbs EUV exposure light. The absorbing film (15) is a phase shift film which permits exposure light, which passes through the film and is reflected by the multilayer reflecting film, to generate a predetermined phase difference with respect to the EUV exposure light which directly enters and is reflected by the multilayer reflecting film. The multilayer reflecting film (13) in a blind area is formed by removing a plurality of layers or all the layers from an upper layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012151368-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016063020-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014168019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347485-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8702901-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012146217-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014056895-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014232844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013201315-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013206936-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017169973-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014229652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016126319-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101302805-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012182289-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014186754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012204708-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013058785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012129505-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014107332-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017078782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011108942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9507251-B2 |
| priorityDate |
2008-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |