| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e69fabb0015a7bae19b5e7180e0d4912
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0361d142f3305312548c613620b3856b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3259605bd1222bfa0c4d1e0cb6daf430 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00166 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-589 |
| filingDate |
2009-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42e82ff0892cd5c7d52dd6cf138c93c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_576f81b509287ec733de1d543485c882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21fdaa8afb8941a7cceecee594a7147 |
| publicationDate |
2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009124857-A3 |
| titleOfInvention |
Method for the production of ceramic structures containing silicon |
| abstract |
The invention relates to a method for producing ceramic structures (3) containing silicon. In said method, structures of a ceramic precursor polymer (1) selected from the group comprising polysiloxanes, polycarbosilanes, polysilazanes, and/or polyureasilazanes are provided on the surface of a substrate (2), and the ceramic precursor structures (1) on the substrate (2) are ceramized. In the method according to the invention, the structures (1) of the ceramic precursor polymer have a height of ≤ 20 μm and a width of ≤ 500 μm perpendicular to the longitudinal axis (a, a') thereof. The invention further relates to a ceramic structure (3) that contains silicon and can be obtained according to the invention as well as a sensor comprising such a structure. |
| priorityDate |
2008-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |