http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009122497-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_09cf3ac9800a6c2f0c0b0609f80d471c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec3af9072cf2cdc7a99f55c1775f8091 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 |
| filingDate | 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_765be3e2519cf78618925aa52f7cc5db |
| publicationDate | 2009-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2009122497-A1 |
| titleOfInvention | Ferroelectric memory and its manufacturing method, and ferroelectric capacitor manufacturing method |
| abstract | [PROBLEMS] To provide a ferroelectric memory and its manufacturing method, and a ferroelectric capacitor manufacturing method, by which variations in ferroelectric characteristic within the substrate surface can be reduced. [MEANS FOR SOLVING PROBLEMS] A ferroelectric memory comprising a silicon substrate (30), transistors (TR1) formed on the silicon substrate (30), and ferroelectric capacitors (Q) formed above the transistors (TR1) is characterized in that the ferroelectric capacitor (Q) includes a lower electrode (47a), a ferroelectric film (48) formed on the lower electrode (47a), an upper electrode (49a) formed on the ferroelectric film (48), and a metal film (70) formed on the upper electrode (49a). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013026417-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014127614-A |
| priorityDate | 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.