http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009104803-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb992e6539edb3cd7ddea2df1aa47731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b558cfefe9fced53f4c11f7fa3b4e154
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7de0d3566c105878d0039bc108b7e66
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K2201-067
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K1-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
filingDate 2009-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f78d8bd4dcf2193d71e9742873938bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10c024cacfee7c01f48373df4384329f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b2b073173a4b7391939fd196ab98e6
publicationDate 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2009104803-A1
titleOfInvention Optical component for euvl and smoothing method thereof
abstract The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL. The present invention relates to a method for smoothing the optical surface of an optical component for EUVL, comprising irradiating, with an excimer laser having a wavelength of 250 nm or less with a fluence of 0.5 to 2.0 J/cm2, the optical surface having a concave defect of an optical component for EUV lithography (EUVL), the optical component being made of a TiO 2 -containing silica glass material comprising SiO 2 as a main component.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2323138-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2323138-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8124302-B2
priorityDate 2008-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5742026-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006166109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007072890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002110348-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448874516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11137276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454485736
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166632

Total number of triples: 46.