| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_83f0ec4a6ec9ed4eda169b5d792ef577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_90c416806ea4ac22d29cc333535bc7c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11bdc7da6543b078bb43f81bd4f8c73f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_596f7ae3e79bc578e17a444424a1dee6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_454ac313894bbe7fd067af6bc6cff187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e563fed459a5ff67fb2a91b6dae90c24 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02 |
| filingDate |
2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47efb5353e6cff10933966b6ec12b588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6371c200324a408012641d75a6fe036d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a37f0424d1ee80cdf22072f2eae2240
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c94e09252b95dd804ec03199c7b69e98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23bdde2b8e4ae139e880b95e1cf0fa97 |
| publicationDate |
2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009102882-A1 |
| titleOfInvention |
Method and system for optical mems with flexible landing structures |
| abstract |
An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion. |
| priorityDate |
2008-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |