| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6da834a81063773f40821fbc9d92795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd878fad714dfe8f3d8b81308afe0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| filingDate |
2008-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a104a6b1f46fb529f6c73932604cb832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8400dcdc96fc6fc745ef7fa9ed44ff2c |
| publicationDate |
2009-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009101474-A3 |
| titleOfInvention |
Semiconductor device and method for manufacturing the same |
| abstract |
A method for manufacturing a semiconductor device pertaining to the present invention includes the steps of forming a first film containing fluorine added carbon on a semiconductor substrate, forming a second film containing a carbon-carbon bond on the first film, and forming a third film on the second film. |
| priorityDate |
2007-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |