http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009086915-A1

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filingDate 2008-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86bad4fc7c50be2db0c5b8d5c1f88f75
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publicationDate 2009-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2009086915-A1
titleOfInvention A method for making a 3d nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method
abstract The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of : i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
priorityDate 2008-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 30.