Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2008-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a5f95e7b1a642048421c1cf19c5cd68 |
publicationDate |
2009-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2009085164-A2 |
titleOfInvention |
Halide anions for metal removal rate control |
abstract |
The inventive chemical-mechanical polishing composition comprises a liquid carrier, hydrogen peroxide, benzotriazole, and a halogen anion. The inventive method comprises chemically-mechanically polishing a substrate with the polishing composition. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103450812-A |
priorityDate |
2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |