| abstract |
Resonators arranged in an NxM MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections. Each resonator is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape, and the coupling sections are disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, (i.e, beam sections exhibiting elongating/breathing-like and bending-like motions). One or more of the array structure's resonators may include one or more nodal points (i.e, substantially stationary and/or experience little movement), which are suitable and/or preferable locations to anchor the resonator/array to the substrate, in one or more areas of the structure's curved sections. |