| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe50a62ae3626294c694eb180ba8122d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d12f570a15ed8e6f3decba658c43e60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6dbac7e120d16a1b00227128273a5fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a7691435c85efaec592d5058d8596d60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_daf3c13f33dda2038c25c1a514021b6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-00 |
| filingDate |
2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09bad423c14b9f00e4ed174a3f250fad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_876624d60e036c88af19e2fd6cff5f76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4467c1b0db1c84f34834af0d83055587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_868549f354a9c1dab819f2c4d2621c9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea0d5082f45a9ec2c705d5670928b5f9 |
| publicationDate |
2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009044960-A1 |
| titleOfInvention |
Gap-filling composition with excellent shelf life by end-capping |
| abstract |
A composition with improved shelf life for filling small gaps in a semiconductor device is provided. The composition comprises an end-capped silicone polymer. The molecular weight of the end-capped silicone polymer is not varied during storage. In addition, the dissolution rate (DR) of the composition in an alkaline developing solution is maintained at a desired level during storage. That is, the composition is highly stable during storage. Therefore, the composition is suitable for use in a node separation process for the fabrication of a semi-conductor capacitor. |
| priorityDate |
2007-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |