| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_412d54079a0ff08d7e609b102a9f7946
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e13c109e5fd75db775d35215a11921c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10dd60a7ce2401816160443642fe5ad9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2008-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_506aa72b35306787b27a9d8d5d52e4d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9633134ba71b2bcc8ec342ac898a04b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bad6ae40c83ecfed652c33b8bb31f30 |
| publicationDate |
2009-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009022583-A1 |
| titleOfInvention |
Porous silica precursor composition and method for preparing the same, porous silica film and method for forming the same, semiconductor device, image display device, and liquid crystal display device |
| abstract |
Disclosed is a porous silica precursor composition containing an organic silane represented by the following chemical formula 1: R1m(R2-O)4-mSi (wherein R1 and R2 may be the same or different and each represents an alkyl group, and m represents an integer of 0-3), water, an alcohol and a quaternary ammonium compound represented by the following chemical formula 2: R3N(R4)3X (wherein R3 and R4 may be the same or different and each represents an alkyl group, and X represents a halogen atom). This porous silica precursor composition is prepared by mixing such components. A porous silica film is formed by coating and firing the porous silica precursor composition. Also disclosed are a semiconductor device having a porous silica film, an image display device, and a liquid crystal display device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017039618-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022059353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010254559-A |
| priorityDate |
2007-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |