| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c8866eec47ed946faf95065c5aa48e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77327ecac15edb7b22ece7b4ae0d2314 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76844
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76805 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0029f6344e9874c49d46b56c9a03eae1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_166cd0a36dbcec7a97e3efc039d92a67 |
| publicationDate |
2009-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2009018062-A1 |
| titleOfInvention |
Interconnect structure with grain growth promotion layer and method for forming the same |
| abstract |
[0034] In general, the present invention provides an interconnect structure and method for forming the same. This present invention discloses an interconnect structure includes a Cu seeding layer embedded between a diffusion barrier layer and a grain growth promotion layer. Specifically, under the present invention, a diffusion barrier layer is formed on a patterned inter-level dielectric layer. A (Cu) seeding layer is then formed on the diffusion barrier layer, and a grain growth promotion layer is formed on the seeding layer. Once the grain growth promotion layer is formed, post-processing steps (e.g., electroplating and chemical-mechanical polishing) are performed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011032812-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2485689-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2485689-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105097656-A |
| priorityDate |
2007-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |