| abstract |
In hydrogen sensors (10a, 10b, 10c, 10d), a thin film layer (12) is formed on a substrate (11), and a buffer layer (13) is laminated on the thin film layer (12). Furthermore, a catalyst layer (14) is laminated on the buffer layer (13). The catalyst layer hydrogenates the thin film layer (12) when the catalyst layer is brought into contact with hydrogen gas and changes the optical reflectance of the thin film layer (12). Component diffused from the thin film layer (12) to the catalyst layer (14) are bonded with component diffused from the buffer layer (13) to the catalyst layer (14), and the catalyst layer (14) is prevented from being oxidized. As a result, the catalyst layer (14) or the like is prevented from being oxidized due to repetition of hydrogenation of the thin film layer (12), and deterioration of hydrogen detection sensitivity of the hydrogen sensors (10a, 10b, 10c, 10d) is suppressed. |