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filingDate 2008-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2008146638-A1
titleOfInvention Thin film and method for manufacturing semiconductor device using the thin film
abstract A thin film to be used in a process of manufacturing a semiconductor device is provided. The thin film is formed on a semiconductor substrate and can be removed after being used for a specific function. The thin film includes silicon, germanium and oxygen. A semiconductor device manufacturing method using such thin film is also provided.
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