| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a587403c633b2a2c65f276d53fb17fe1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f23955865aea8a38235579792a357d3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2008-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21672a42a64e8f5469d759735ca4f906
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec725a413cd906fe8c971de3cf72e4e2 |
| publicationDate |
2008-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008142093-A1 |
| titleOfInvention |
Chemical-mechanical polishing composition comprising metal-organic framework materials |
| abstract |
The present invention relates to compositions for chemical-mechanical polishing comprising A 0.01 % to 40 % by weight based on the total amount of the composition of abrasive particles of at least one porous metal-organic framework material, wherein the framework material comprises at least one at least bidentate organic compound which is coordinately bound to at least one metal ion; B 40 % to 99.8 % by weight based on the total amount of the composition of a liquid carrier; and C 0.01 % to 20 % by weight based on the total amount of the composition of a polishing additive component. The invention further relates to the use of said composition as well as methods for chemical-mechanical polishing of a surface with the aid of said compositions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011097954-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2236247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101781323-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101857773-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101787043-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992644-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2743968-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2743968-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115109448-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110526208-A |
| priorityDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |