Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_956af38ecf56df276f725d65b2eb7348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_592f0bdd21ed07a612137568418dd6b4 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-516 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40111 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 |
filingDate |
2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3225dcff24b83a609690b879c5f5e848 |
publicationDate |
2008-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2008126961-A1 |
titleOfInvention |
Mfmis-fet, mfmis-ferroelectric memory device, and methods of manufacturing the same |
abstract |
Disclosed herein are a metal-ferroelectric-metal- insulator-semiconductor (MFMIS) field-effect transistor (FET), an MFMIS-ferroelectric memory device, and methods of manufacturing the same. The FET and the ferroelectric memory device in accordance with the present invention include: a substrate 1; a transistor formed on the substrate 1; and a ferroelectric capacitor formed on the transistor, the ferroelectric capacitor including a lower electrode layer 42, an upper electrode layer 44, and a ferroelectric layer 43 disposed between the lower and upper electrodes. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11170834-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10727336-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11706929-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108400165-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741567-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741755-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10622556-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244951-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784374-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11393978-B2 |
priorityDate |
2007-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |