| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe4a8548f1b73ad47d3b6dce619687e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_22ac28dd21d4688c6cffe14ef73395f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28bd6515b0fe9fb24d6857ea2cf27cb8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c467e072f5cef8f048717d638802f18 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21 |
| filingDate |
2008-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae5b5a0c654648700cb68fc8a454ef2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f4a748456e902e04059a82d80113917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a4b1c1073ef1e8f568f27afda6ea935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4af9b8b5b8e8e13503ea39b5791d460 |
| publicationDate |
2008-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008117897-A1 |
| titleOfInvention |
Cyclic siloxane compound and positive resist composition using the same |
| abstract |
Disclosed is a cyclic siloxane compound which enables to obtain a positive resist composition having excellent physical properties as a resist. Also disclosed is a positive resist composition using such a cyclic siloxane compound. Specifically disclosed is a cyclic siloxane compound which is obtained by hydrosilylating a compound represented by the general formula (1) below and/or a compound which is obtained by hydrosilylating a compound represented by the general formula (1) below with a divinyl compound represented by the general formula (2) below, with a monovinyl compound represented by the general formula (3) below. (1) CH2=CH-R2-CH=CH2 (2) CH2=CR3-(R4)h-T (3) |
| priorityDate |
2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |