| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d31d1f923546d09046d63822169e9a37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8dda337b7b6831fe63a87543cfde1008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37dbda4ffd1ea777b6a4ee085839a442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e9c9ce39bd10cdfec0057afe48e6710 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2008-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21d8d7bf2c5881aaf5520db5fd65c507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_934ec355cc382ee63325f9853c57dd30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4996f29363f94d15f5328f7c564ecc45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9a293d4bd89cad7b90801f344aea5c6 |
| publicationDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008099903-A2 |
| titleOfInvention |
Fine pattern transfer material |
| abstract |
[Purpose] To provide a transfer material that can favorably form a fine pattern by nanoimprinting. [Resolution Means] The nanoimprinting transfer material is a fine pattern resin composition that includes an organosilicon compound and a metal compound of a metal from groups 3 through 14 of the periodic table. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011217809-A1 |
| priorityDate |
2007-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |