| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e96496a9949403e2af2ca913e65bfec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b03275edf46fc0892074acf8eb68cb16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab877b5cab0ec240da41313a80a7c077 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| filingDate |
2007-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dd41acee7fa708fab2fddb7030f4ef7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf6e79f6a090bfcbe596681099f41e92 |
| publicationDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008091279-A2 |
| titleOfInvention |
Etching and hole arrays |
| abstract |
Lithographic and nanolithographic methods that involve patterning a first compound on a substrate surface, exposing non-patterned areas of the substrate surface to a second compound and removing the first compound while leaving the second compound intact. The resulting hole patterns can be used as templates for either chemical etching of the patterned area of the substrate or metal deposition on the patterned area of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017166070-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015214757-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10240050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010085767-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012515559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012515560-A |
| priorityDate |
2006-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |