Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee083918eb46872e9dddc6b84192cb68 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L65-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D165-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D181-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L81-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00 |
filingDate |
2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_336f01b929ce9de2a3f0ec0da7362a21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109b388f1bf0fd5a5df2dc9b3c4787cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26c4452acd3ea1b49113af05226b02b2 |
publicationDate |
2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2008078185-A2 |
titleOfInvention |
Antireflective coating compositions |
abstract |
The present invention discloses novel bottom anti-reflective coating compositions where a coating from the composition has an etch rate that can be regulated by the etch plate temperature. |
priorityDate |
2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |