| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e2548cb4f6c20e08a27dcde7de199a85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69901e84c71023514006a635c6d1e8cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1588d09dc81a7542ed3db703316956c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc46b1c550b8d90fda70c53692c2daae |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31637 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2007-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06f2e34cdd174d06cbd7dbb26da89b73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0c2cce84a7212134ed5df16c514bc58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c19c43e56eb033244d6e0b252afac6 |
| publicationDate |
2008-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008070632-A1 |
| titleOfInvention |
Phosphorus-stabilized transition metal oxide diffusion barrier |
| abstract |
Method for controlling glass formation on a semiconductor substrate. By using a doped diffusion barrier material, such as a transition metal oxide paste, the subsequent diffusion of glass forming elements into the substrate may be stabilized and controlled. |
| priorityDate |
2006-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |