| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cbba15f5ad2c093c1e0b13f210c0449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98c1144a1475f926677b31089f8e8f15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff0d32d2e8ab9a053b7bcbf149ff79a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c9181077df02acdfc569200cf4306f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b693ee11f88eaccf64cb5b36c79eb0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_646fe16ca3d2bf90fb0810363d04c73b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2007-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87614ccf737878dafcd4fb6213aabda2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f51947326f7afae3610aaeca3e258ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7256ee7be92108070ea6329c0fdc63c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7baa40db2b8ec80bccfa978846bca155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7421e1e027039dd2e32c2c3e9402747c |
| publicationDate |
2008-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008070631-A2 |
| titleOfInvention |
Method and apparatus for preventing the formation of a plasma inhibiting substance |
| abstract |
A system and method for preventing formation of a plasma-mhibiting substance withm a plasma chamber is provided In one embodiment, an apparatus that includes a barrier component configuied to be disposed within a plasma chamber. The barrier component includes a wall that defines a plasma formation region where a chemically- reducing species is formed fiom a fluid. A portion of the wall is formed of a substance that is substantially inert to the chemically-reducing species. The wall prevents the chemically-reducing species from interacting with an mnei surface of the plasma chamber to form a conductive substance. The barĪei component also includes an opening in fluid communication with the plasma formation region. The fluid is introduced into the plasma formation region via the opening. |
| priorityDate |
2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |