http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008053032-A8
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86e7fa5710c0d972ddb2588d1ba3b7ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9de58c5ad98a5e2bee5f0a21c557702e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3c11d3f445566821cc6143c160b6b115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f9dfaa3f4681a42d2f00b004f4e2ba7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c1ad6a03bfd8a9556c78e6d88437c62 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-541 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02S50-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-208 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-032 |
| filingDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a63859b86d2ba16d42c5154020d32023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b0427c4f0841f59bde9a7a34cc1e875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_176efdb4e219f1eec2b3b1916fd06166 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_905e7be2dccad5762786053e85279a77 |
| publicationDate | 2008-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2008053032-A8 |
| titleOfInvention | Method for measuring the sheet resistance of at least two-layered electronic components via isolation trenches |
| abstract | The invention relates to a method for measuring the sheet resistance of at least two-layered electronic components via isolation trenches in at least one layer. The method is suitable in particular for the process control of thin-film solar cells, for example chalcopyrite thin-film solar cells, but also of other components with metallic or semiconducting layers on a substrate which are divided into individual sections lying next to one another by isolation trenches. It is proposed that after at least one further layer has been applied to the layer into which the isolation trenches were introduced, proceeding from a contact point, the resistances (R) are successively measured over at least one isolation trench (P1) and over at least respectively one further isolation trench to said contact point and from the measured values the total sheet resistance (R/P1) is averaged over the number of isolation trenches. The method can be used for example to monitor the production process of the components mentioned at the outset such that manufacturing deficiencies can be identified as early as during the production process. |
| priorityDate | 2006-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19601290 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448612525 |
Total number of triples: 26.