| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59c6a921f33fe0adc58c2b6177184515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01620dc7d58e38cf2ec6c56a620c26ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2f33954c77b8e85845b7a976ba2059a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b40acb5f8f1ec71c240366832d455e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087d1ba21b042ab0caaf12ea04e40426 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2343-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2300-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2323-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G83-001 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2007-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c43e870b61e3b8cb02740147039affa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40b40df8bc10eab59b975bc6a07077f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba5adfcf459f0201e0aad4ffc4cf61ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0228c09f07a032b233f1ec2bb0553a91 |
| publicationDate |
2008-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008052216-A2 |
| titleOfInvention |
Polymeric microgels for chemical mechanical planarization (cmp) processing |
| abstract |
Organic-inorganic composites were prepared as colloidal particles of a cross-linked, thermally responsive polymer. Hybrid PNIPAM-polysiloxane particles and composite polymeric particles with embedded nanoparticles of an inorganic metal-oxide (MOx) such as CeO2 and TiO2 were formed. To promote the incorporation of unaggregated nanoparticles, temperature responsive microspherical gels (microgels) of N-isopropylacrylamide (NIPAM) with interpenetrating (IP) linear chains of poly(acrylic acid) (PAA) were used. The organic-inorganic composition of the hybrid polymer network was controlled by changing the time for condensation and hydrolysis of the siloxane monomer during synthesis. Experimental results indicated that the planarization of silicon oxide wafers using these hybrid particles and composites exhibited lower topographical variations and surface roughness as compared to slurries consisting of only silica or ceria nanoparticles while achieving similar removal rates and better or similar frictional characteristics. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101916555-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9725621-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9982166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10955763-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103091277-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9568847-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015095154-A1 |
| priorityDate |
2006-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |