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publicationDate 2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2008041551-A1
titleOfInvention Method for fabricating transparent conductive tin oxide film
abstract A method for fabricating transparent conductive tin oxide film, which can be grown at a low temperature and shows an extremely high conductivity, comprises a step (1) of forming a thin film by coating and drying a precursor solution including fluorine and tin on a substrate, a step (2) of a first light irradiation for irradiating the thin film obtained in the step (1) with ultraviolet rays, a step (3) of heat-treating the thin film obtained in the step (2), and a step (4) of a second light irradiation for irradiating the thin film obtained in the step (3) with ultraviolet rays.
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