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publicationDate 2008-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2008008478-A2
titleOfInvention Spatial light modulator featured with an anti-reflective structure
abstract A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure,
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