| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_809df40e05fa633f5d068cbb2b96338f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57c4249f11e1f91133d2e5603f428096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3163957db744d0171ae3ff8ab14f0d5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate |
2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edeff9dbf04b762b548a32b1d9f8c6f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03dbcaceba196d061f260b06b42742cf |
| publicationDate |
2008-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2008002046-A1 |
| titleOfInvention |
Apparatus and method for generating solid element neutral particle beam |
| abstract |
There is provided an apparatus for generating solid element neutral particle beam. The apparatus comprises a) a plasma discharging space inside which a plasma discharge takes places to produce plasma, b) a solid element coating layer positioned at side of the plasma discharging space to which a first bias voltage is applied to drive plasma ions to the solid element coating layer, c) a first magnetron unit that applies magnetic field across the solid element coating layer, and d) a metal plate positioned at top of the of the plasma discharging space to which a second bias voltage is applied to drive solid element cations to the metal plate. Preferably, the apparatus further comprises a second magnetron unit that applies magnetic field across the metal plate. Par¬ ticularly preferable is that each of the first and second magnetron units comprises a central pole and a side pole having a race track arrangement. The apparatus is useful for surface treatment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9732419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2607516-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103766002-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2720518-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3002996-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015133321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102388468-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589772-B2 |
| priorityDate |
2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |