http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007146671-A3

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publicationDate 2008-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2007146671-A3
titleOfInvention Ultaviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water
abstract In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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