http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007128754-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c153525772cb2a94f93ded9580e72cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e511432cd26d0a72eb8681b8cfffe2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_125fa2ba0bbb771ea086c3f9f9948faf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02aee3c0a085b0c65bbfd5d72ffe2f1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c75b341952ffaf6687ca1a5be3463651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f95b1a5d276301ba4dd47d4dca43a58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddad49c7e15b780da1abe3211e336712
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
filingDate 2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86fae5687fc1e55fefc886b396adbee2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8844fc27723dc9e45ce676eb3ebbd6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b348972b88e111b69478b56147e237b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6d5a2b6f097c8ddceb6c2cc707b6a6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b26661f3dc30dd58e49d5bef440db78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bd19634a2df5398e83b67dd28c4c988
publicationDate 2007-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2007128754-A1
titleOfInvention Method and structure for creation of a metal insulator metal capacitor
abstract The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010103140-A
priorityDate 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0920061-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002006674-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0749167-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520488
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID363212
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID363212
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID292779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785

Total number of triples: 41.