Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c153525772cb2a94f93ded9580e72cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e511432cd26d0a72eb8681b8cfffe2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_125fa2ba0bbb771ea086c3f9f9948faf http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02aee3c0a085b0c65bbfd5d72ffe2f1f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c75b341952ffaf6687ca1a5be3463651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f95b1a5d276301ba4dd47d4dca43a58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddad49c7e15b780da1abe3211e336712 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2007-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86fae5687fc1e55fefc886b396adbee2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8844fc27723dc9e45ce676eb3ebbd6e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b348972b88e111b69478b56147e237b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6d5a2b6f097c8ddceb6c2cc707b6a6d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b26661f3dc30dd58e49d5bef440db78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bd19634a2df5398e83b67dd28c4c988 |
publicationDate |
2007-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
WO-2007128754-A1 |
titleOfInvention |
Method and structure for creation of a metal insulator metal capacitor |
abstract |
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010103140-A |
priorityDate |
2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |