http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007109346-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ed1c5961d2c0637cf9993943249ee92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f213f06c1f684b76fd16d563aad99493 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7cba753ee4634023d63ae88cf29710cc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K37-0091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2007-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0bdf1bb974889f947590eb473e5eec2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a4a96906d107335f8e6232d4f59f467 |
| publicationDate | 2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2007109346-A2 |
| titleOfInvention | Mass pulse sensor and process-gas system and mehthod |
| abstract | An improved valve device, a valved process-gas apparatus, and a method for confirming operations in a gas-process system are disclosed. The valve device includes an electronically controlled valve designed to cycle between closed and open conditions, with closed-to-open and open-to-closed response times less than about 250 ms, to control the flow of a gas through the valve. A sensor disposed at the downstream side of the valve is operable to (i) detect the presence of at least a threshold amount of gas during the period of the valve's closed-to-open response, and (ii) to detect the absence of at least a threshold amount of gas after the period of the valve's open-to-closed response, thus confirming successful operation of the valve. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2574884-A3 |
| priorityDate | 2006-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.