| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98b74b611f5d9f9bd861d78bbf71cde3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d96eaf01084baf32e35871491c220b0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c4c77ef73dac96eae2b080dee80c406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffe2ce83db811a9dd18d4806346d0a41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70cb5e226874611a3af644ddf7a3d996
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16a8cbd876867c7d5cd8c16f7e6827b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_faf522b8b83eded745c73018576219ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_feae6e7fe413046f71f955428fd3c32c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_508f0dc76d11db155ba210eee36c56a9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01T1-29 |
| filingDate |
2007-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98673453a2b45310182436cd5fce0953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe31486e0577e754df43f4c2954b0e1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04db21872601286c5e1eb746f4005a22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87f9191e83feaa19e3ef02e38dcdf41c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b855c5a48c3df57ce2e748dc71e31db8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e216a1160de68ac0f09ad792b8171c57 |
| publicationDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007108320-A1 |
| titleOfInvention |
Apparatus and method for measuring profile of electronic beam and laser beam |
| abstract |
An apparatus for measuring profiles of electronic beams and laser beams is provided with a profile measuring apparatus (30) for measuring the cross-section profile of each beam in the vicinity of a collision position where an electronic beam (1) and a laser beam (3) are brought to a frontal collision; and a moving apparatus (40) for continuously moving the profile measuring apparatus in a prescribed direction which substantially accords with the axial direction of each beam. Furthermore, based on the cross-section profile provided by the profile measuring apparatus, the position of the cross-section profile in a prescribed direction, and beam oscillation timing, changes of the three-dimensional profiles of electronic beams and laser beams with time are formed by a profile forming apparatus (50). |
| priorityDate |
2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |