| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_351266bb714df09224a7007992c9998a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a1933906eeef8f5a1fc88af21cfac281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10ceda181c618414cc44b5210a17f9c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c3b16f8b5b52aba9f6d1639ca4e1190 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-303 |
| filingDate |
2007-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92c866b92034e7c8ab9bf709794fc2de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd4aa31f4b42b2b09c1e9bb4988ad5f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e51ba05f48e344b960f5cbb330411841 |
| publicationDate |
2007-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007100615-A2 |
| titleOfInvention |
High-sensitivity surface detection system and method |
| abstract |
An inspection system and method for inspecting a sample surface, with a light source for generating a probe beam of light, a high NA lens for focusing the probe beam onto a sample surface, and collecting a scattered probe beam from the sample surface, optics for imaging the scattered probe beam onto a detector having a plurality of detector elements that generate output signals in response to the scattered probe beam, and a processor for analyzing the output signals to identify defects on the sample surface. Shaping the beam into a stripe shape increases intensity without sacrificing throughput. Offsetting the beam from the center of the high NA lens provides higher angle illumination. Crossed polarizers also improve signal quality. A homodyne or heterodyne reference beam (possibly using a frequency altering optical element) can be used to create an interferometric signal at the detector for improved signal to noise ratios. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107543824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113125436-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111247418-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112204377-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015071642-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113125436-B |
| priorityDate |
2006-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |