| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95585944cd76ddfb6dc33ed2a0b84403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f8269fd9f6bf419607d0fca2e0d2143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f2262406cd127a0316f719112f7feee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a722744e77c81c5f5cf415087e2ee92b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C67-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C43-303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H15-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07H9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07J9-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C41-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc5effb5fde862e9f4f2dd0d366c46f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1f2d8e1cdee2923f2b14215501fc361 |
| publicationDate |
2007-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007094784-A1 |
| titleOfInvention |
Adamantane based molecular glass photoresists for sub-200 nm lithography |
| abstract |
Disclosed are glass photoresists generated from adamantane derivatives containing acetal and/or ester moieties as novel high-performance photoresist materials. Some of the disclosed adamantane-based glass resists have a tripodal structure and other disclosed adamantane-based glass resists include one or more cholic groups. The disclosed adamantane derivatives can be synthesized from starting materials which are commercially available. By way of example only, one of many disclosed amorphous glass photoresists has the following structure: GR-5 Adamantane-l,3,5-triyltris(oxymethylene) tricholate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010146901-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010087339-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8994016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011018886-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009143482-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2256797-A3 |
| priorityDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |