http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007085015-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bedffb9a0a0b27c240711da067732e40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48d555b8b2dd7bffcb2eae8c7ecf2d24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b13793cada1bc8dd803e4217184f0bb3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f5aa1c142ad1e70157c86a953323c44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a964c1f82e7d5f135deb61f8053f5277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6692fc5872ed9e513c461422eeafae92 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00 |
| filingDate | 2007-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc7fc87e688ea96fe2d3be8ff405bf6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f35a46aa04c7a0e70528eacc435450b5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a2adba4df04bf505f1fd977eaa3f973 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c399d777e5f7024fc93238fa8cee001e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bed7e3cdcf8d6cd01474a740fbd298cd |
| publicationDate | 2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2007085015-A2 |
| titleOfInvention | Acoustic energy system, method and apparatus for processing flat articles |
| abstract | A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012522387-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9492852-B2 |
| priorityDate | 2006-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.