http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007084653-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62f941494409aea84f621977c5f0ab81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff81a650b70e913d3b2524b45e4c7320 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1edd7576e8148b04006c1c27a2732e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e1bd69ff4c7173093613c6835338774 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R23-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R23-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R9-08 |
| filingDate | 2007-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f35a43e3f8d8d7c612f9af6fc4c272ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e2bc8d87d8a3f79c29875712231a513 |
| publicationDate | 2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2007084653-A2 |
| titleOfInvention | Optical sensing in a directional mems microphone |
| abstract | A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry. |
| priorityDate | 2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.