| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_67c41e9300b5848ae30421e584cfe657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6416165ecdd676e3707a55f698bf95c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3464 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 |
| filingDate |
2006-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_636aa07fb9c6e61161a916022bd33c13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777003fda13513f172bcc451e37847d5 |
| publicationDate |
2007-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007074563-A1 |
| titleOfInvention |
Film forming apparatus and process for producing light emitting element |
| abstract |
A film forming apparatus characterized by including a treating vessel having, provided thereinside, a holding table for holding of a treatment object substrate, two targets opposite to each other and gas supply means for feeding of a treating gas to be plasma excited into the treating vessel so that by applying of voltage to the two targets and plasma exciting of the treating gas, a conductive layer is formed on an organic layer superimposed on the treatment object substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007145255-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8263174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007145256-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007220358-A |
| priorityDate |
2005-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |