| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa67eb74ea5b96d9f8f2cfdb3b025770
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9b181cf8f7e39ce64b5021bc8872d9a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C23-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C25-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F02B31-00 |
| filingDate |
2006-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c4919ba2713bab6ba5080e6ced2e6ab |
| publicationDate |
2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007062001-A2 |
| titleOfInvention |
Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system |
| abstract |
The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gas are reduced or eliminated by introducing a reactive gas upstream of the device affected by deposits. The amount of introduced reactive gas is controlled by measuring gas phase concentrations of exhausted gas components upstream and downstream of the affected device, and, from those measurements, determining whether the components are being consumed in deposits on the affected device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2872875-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008054591-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9464512-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008054591-A3 |
| priorityDate |
2005-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |