| abstract |
An alloyed fluorocopolymer which comprises a fluoroelastomer copolymer having a fluorine content of 64 wt.% or higher and a resinous tetrafluoroethylene/perfluoro(alkyl vinyl ether) copolymer having a quantity of heat of crystal fusion, H, of 10 J/g or less. A crosslinked molded article obtained from this alloyed fluorocopolymer has excellent plasma resistance in each of a CF4 plasma treatment and an O2 plasma treatment and has excellent unsusceptibility to cracking by plasma irradiation. When the crosslinked molded article is a seal, the seal shows required values of dry material properties and of compression set. The molded article is flexible and, hence, is apt to have a low hardness when used as a seal. Furthermore, the alloyed fluorocopolymer can be molded at relatively low temperatures. |