| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93d53d2e4b4061eba6cb9e00e0f31b68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a55f89b253f9cb019a1204b86f380cd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4bc9941003102a43fa4bdc9c548bdbb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27562ace359200dce7274340b5c7c28b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2006-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_287f80bb13c4cdb4e47061dbef453768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d57441214fb9ffa72007a7d9dfef758
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d08161bc5570651b01dc6f5149ef1041 |
| publicationDate |
2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2007016682-A2 |
| titleOfInvention |
Systems configured to generate output corresponding to defects on a specimen |
| abstract |
Systems configured to generate output corresponding to defects on a specimen and systems configured to generate phase information about defects on a specimen are provided. One system includes an optical subsystem that is configured to create interference between a test beam and a reference beam. The test beam and the reference beam are reflected from the specimen. The system also includes a detector that is configured to generate output representative of the interference between the test and reference beams. The interference increases contrast between the output corresponding to the defects and output corresponding to non-defective portions of the specimen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8964088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9049353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9503606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11216881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10614520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10997659-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8736924-B2 |
| priorityDate |
2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |