| abstract |
This invention provides a process for producing a positive-working resist composition, comprising the step (I) of passing a positive-working resist composition, comprising a resin component (A), which causes an increase in alkali solubility through the action of an acid, and an acid generating agent component (B), capable of generating an acid upon exposure, dissolved in an organic solvent (S), through a filter (f1) provided with a nylon film. The resin component (A) is a copolymer comprising at least two types of constitutional units produced by allowing an acid to exist in the polymerization of at least one monomer. There are also provided a process for producing a positive-working resist composition, which can form a resist pattern which has been reduced in both bridge defects and reprecipitated defects, and a positive-working resist composition, and a method for resist pattern formation. |