| abstract |
A ceramic multilayer board which prevents nonuniform deformation without adding a special process. A plurality of stacked ceramic layers and at least one conductor pattern (13, 14) arranged on at least one ceramic layer are provided, and a cavity (12) is formed at least on a first main plane (10a). At least one ceramic layer having an opening which forms the cavity (12) is provided with a deformation preventing pattern (15) which is arranged to surround the entire circumference of the opening and is made of a same material as that of the conductor pattern. |