| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8608ba743b941f02f155b75284bde817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fd605903581ac32f4d750155c2b6d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7842adadba8c8ab609c9f995063b3b76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53c8ba9f5bb6c1822c6d31bfcc07923c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89af0bde61ee35284d4fafcb598f1f67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a758895ccecb2166f9df7645c18cb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2f42246a5ccd03418aad54ceb7c9986 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3342 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate |
2006-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2470d577281d04a950746228271116a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de114647ae60928bdb209b5702350e56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccc67ae8b2c70f5e68f63fbcf387f7a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aba288bc437608784370bc6edbb9335b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c84a23735eb0257bcef234b56afd3d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77afaf4abf29aa51c85804e041d0dca2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98d6eb2fe0300587786bc47f35963b44 |
| publicationDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006106872-A1 |
| titleOfInvention |
Plasma doping method and system |
| abstract |
Plasma doping method and system for providing excellent uniformity in concentration of impurities introduced to the surface of a sample. In the plasma doping system, a vacuum container (1) is exhausted through an exhaust opening (11) by means of a turbo molecular pump (3) as an exhauster while introducing predetermined gas from a gas supply (2) and a predetermined pressure level is sustained in the vacuum container (1) by means of a pressure control valve (4). Inductively coupled plasma is then generated in the vacuum container (1) by supplying a coil (8) provided in the vicinity of a dielectric window (7) facing a sample electrode (6) with a high frequency power of 13.56 MHz from a high frequency power supply (5). A high frequency power supply (10) for supplying the sample electrode (6) with a high frequency power is provided. Uniformity is enhanced by setting the total opening area of a gas blow-out opening (15) provided oppositely to the central portion of the sample electrode (6) smaller than the total opening area of a gas blow-out opening (15) provided oppositely to the peripheral portion of the sample electrode (6). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8004045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009016778-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8063437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536000-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008218824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008050596-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008059827-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4814960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008123391-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5237820-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008123391-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010522423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011166164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7790586-B2 |
| priorityDate |
2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |