http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006086329-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1570d9fcc10d4f5679f397854f82ae8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-00 |
| filingDate | 2006-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5997e2a4c3369ce6faa9b3d6882229d8 |
| publicationDate | 2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2006086329-A1 |
| titleOfInvention | Processes for the production of organometallic compounds |
| abstract | This invention relates to processes for the production of organometallic compounds represented by the formula M(L)3 wherein M is a Group VIII metal, e.g., ruthenium, and L is the same or different and represents a substituted or unsubstituted amidinato group or a substituted or unsubstituted amidinato-like group, which process comprises (i) reacting a substituted or unsubstituted metal source compound, e.g., ruthenium (II) compound, with a substituted or unsubstituted amidinate or amidinate-like compound in the presence of a solvent and under reaction conditions sufficient to produce a reaction mixture comprising said organometallic compound, e.g., ruthenium (III) compound, and (ii) separating said organometallic compound from said reaction mixture. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009079285-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009013721-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009081432-A |
| priorityDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 243.