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filingDate 2006-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b05996302c0d23addc7160aa71e8d8d2
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publicationDate 2006-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2006074352-A2
titleOfInvention Mems passivation with transition metals
abstract Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
priorityDate 2005-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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