| abstract |
A process for producing a glass plate with a thin film composed mainly of a titanium compound, in which high productivity can be attained while suppressing any deterioration of the quality of the thin film, such as mixing of impurities or occurrence of pinholes. There is provided a process comprising feeding a film forming gas containing a titanous compound, a nitrogenous compound and an oxidizing gas onto a surface, heated to given temperature or higher, of glass plate or glass ribbon during glass plate production to thereby form on the surface a thin film composed mainly of titanium oxynitride, nitrogen-doped titanium oxide or titanium nitride. Further, there is provided a process comprising feeding a film forming gas containing a titanous compound and a nitrogenous compound onto the above surface to thereby form a thin film composed mainly of titanium nitride, wherein the film forming gas further contains a reaction inhibitor capable of inhibiting any chemical reaction between the titanous compound and the nitrogenous compound before arrival of the above gas at the surface. |