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publicationNumber WO-2006053069-A2
titleOfInvention Low-k dielectric layer formed from aluminosilicate precursors
abstract A method for forming a high mechanical strength, low k, interlayer dielectric material with aluminosilicate precursors so that aluminum is facilely incorporated into the silicon matrix of the material, and an integrated circuit device comprising one or more high-strength, low-k interlayer dielectric layers so formed.
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