http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006043723-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1601ebd8ea7e3d0cd21109a2fb6c32a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2a0d0adf5aa8f91560be53e39a6fb51 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2005-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe8fc1b9c67ceee8fe6080c2bbaa49f3 |
| publicationDate | 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2006043723-A1 |
| titleOfInvention | Evaporation source |
| abstract | An evaporation source comprising a melting section (24), a storing section (21), an evaporating section (22), and a jetting section (23). When current is passed through tubular heaters (241, 211), they generate heat and a linear evaporation material (31) is melted. Molten evaporation material (32) moves from a heating container (242) to a heating container (212) and stays there. The evaporation material (32) in the heating container (212) descends from a descending opening (216) along a descending column (224). During the descending process, the evaporation material (32) is evaporated by radiation heat from a tubular heater (221). The vapor of the evaporation material (32) is jetted from a nozzle (232) toward a substrate (61). The tubular heaters (241, 211, 221, 231) are composed of graphite and generate heat when a voltage is applied between electrodes (213, 214), (214, 222), and (232, 233). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2116629-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2116629-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5282025-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2290120-A3 |
| priorityDate | 2004-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.