| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9259ca1aed8c2fe2810c2b07f96f3d5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f42e3fd3be88e494c9ee66a27273a344
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_498fe586d92637371b1a747cb8b5f361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85738507ffd219d3e29dbbb4c535039b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D11-02 |
| filingDate |
2005-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63b63cdc599a1a0d8c672aebda19640d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_650277ed48e597153dc12d64b9e57276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7942242bf42bde99ab689a22db7d386 |
| publicationDate |
2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2006039321-A1 |
| titleOfInvention |
Method and system for injecting chemistry into a supercritical fluid |
| abstract |
A method and system (100) is described for introducing chemistry into a high pressure fluid for treating a substrate. In particular, the method includes dispersing the chemistry throughout the volume of high pressure fluid in order to promote mixing of the two or more fluids, while the high pressure fluid is circulating through a high pressure processing system (110). |
| priorityDate |
2004-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |